Effect of assembling errors on the diffraction efficiency for multilayer diffractive optical elements

L. Gao, Suet To, H.F. Yang, X. Nie, T.C. Liu, C.X. Xue

Research output: Journal article publicationJournal articleAcademic researchpeer-review

Abstract

Based on the expression function of diffraction efficiency, and the phase delay function of diffractive optical elements (DOEs), the diffraction efficiency for multilayer diffractive optical elements (MLDOEs) is described with tilt and decenter assembling errors. A mathematical model of the relationship between diffraction efficiency and assembling errors of MLDOEs is proposed to analyze the effect of assembling errors on the diffraction efficiency of MLDOEs. The analyzed results from the mathematical model provide a range of values for the effect of assembling errors on the diffraction efficiency of MLDOEs. Assembling errors are important parameters for hybrid diffractive refractive optical systems, including MLDOEs, and so the proposed model will be useful for guiding the design and fabrication of such optical systems.
Original languageEnglish
Pages (from-to)7341-7347
Number of pages7
JournalApplied Optics
Volume53
Issue number31
DOIs
Publication statusPublished - 2014

ASJC Scopus subject areas

  • Engineering (miscellaneous)
  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics

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