Dynamic removal function modeling of bonnet tool polishing on optics elements

The dwell time function of the bonnet tool polishing on optics elements is achieved based on static removal function in recent studies. But the polishing tool keeps moving during the process, it's necessary to do the research on dynamic removal function. The static and dynamic contact zone is acquired through finite element simulation analysis, and so is the contact pressure. Both of the contact zones are circle and the size of them are almost the same. The peak point of the dynamic contact pressure has an offset contrary to the direction of the tool movement compared to the static contact pressure. The dynamic contact pressure distribution function is deduced by using the least square method based on the theory that the static pressure distribution function is a modified Gaussian function. The device which can extract both the dynamic and static contact zone is set up to capture them on the condition of different offset. Then the simulation results are verified. The dynamic removal function is deduced and numerical simulated based on the forward simulation and experiment results. The removal rate of the dynamic removal function is smaller than the static removal function and its nadir has a deflection compared to the latter.