Abstract
Novel dual-scaled superhydrophobic nano-flower surfaces were fabricated by 1-mask photolithography, DRIE and Carbon nanotube (CNT) Microwave Plasma Enhanced CVD (MPCVD). Patterned structure was characterized by SEM, TEM and AFM techniques. With the additional petal-like CNT structure, the apparent contact angle (ACA) increased dramatically compared with silicon (∼140%) and parylene-coated (∼78%) micropillar surfaces and resulted in a small sliding angle (around 5°). The sliding angle and dynamic testing indicate that these nano-flower surfaces are stable superhydrophobic surfaces.
Original language | English |
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Title of host publication | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
Pages | 441-444 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 11 Dec 2009 |
Externally published | Yes |
Event | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States Duration: 21 Jun 2009 → 25 Jun 2009 |
Conference
Conference | TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems |
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Country/Territory | United States |
City | Denver, CO |
Period | 21/06/09 → 25/06/09 |
Keywords
- Apparent contact angle
- Dual-scaled roughness
- MPCVD
- Nano-flower
- Superhydrophobic surfaces
ASJC Scopus subject areas
- Hardware and Architecture
- Electrical and Electronic Engineering