Double-layer fabrication scheme for large-area polymeric photonic crystal membrane on silicon surface by multibeam interference lithography

Aping Zhang, Ryszard Burzynski, Yong Kyu Yoon, Paras N. Prasad, Sailing He

Research output: Journal article publicationJournal articleAcademic researchpeer-review

9 Citations (Scopus)

Abstract

We report on the fabrication of two-dimensional polymeric photonic crystal membranes on the surface of silicon using visible-light multibeam interference lithography. The structures are created by the interference of three beams of a green laser. A polymer buffer layer doped with a Rhodamine B laser dye, interlaid between the lithography layer and the silicon substrate, suppresses the effects of strong reflection and nonradiative absorption of silicon on the interference pattern. Large-area defect-free photonic crystal membranes are experimentally realized on silicon surface.
Original languageEnglish
Pages (from-to)1303-1305
Number of pages3
JournalOptics Letters
Volume33
Issue number12
DOIs
Publication statusPublished - 15 Jun 2008
Externally publishedYes

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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