Direct optical micropatterning of poly(dimethylsiloxane) for microfluidic devices

Shaorui Gao, Wing Tai Tung, Dexter Siu Hong Wong, Liming Bian, A. Ping Zhang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

8 Citations (Scopus)


Poly(dimethylsiloxane) (PDMS) is one of the most popular polymer materials for microfluidic devices. However, it still remains a challenge to rapidly fabricate PDMS microfluidic devices with micrometer-scale feature sizes. In this paper, we present gray-scale digital photolithography technology for direct patterning of large-area high-resolution PDMS microstructures for biomicrofluidic applications. With the positive- and negative-tone photosensitive PDMS (photoPDMS), we rapidly fabricated various PDMS microstructures with complex geometries by using a one-step patterning process. The positive-tone PDMS was used to pattern large-area microfluidic chips, while the negative-tone PDMS was utilized to fabricate high-resolution on-chip microstructures and components. In particular, a large-area microfluidic chip of 5.5 2.8 cm2 with complex three-dimensional (3D) staggered herringbone mixers was fabricated from the positive-tone PDMS by using a single-step optical exposure process; a small microfluidic chip with a feature size as small as 5 μm was prepared with the negative-tone PDMS. Furthermore, 3D surface engineering of PDMS microchannels was demonstrated to customize extracellular microenvironments for investigating cell migration.

Original languageEnglish
Article number095011
JournalJournal of Micromechanics and Microengineering
Issue number9
Publication statusPublished - 7 Jun 2018


  • cell migration
  • digital photolithography
  • microfluidic devices
  • poly(dimethylsiloxane)

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


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