Differential optical profilometer using a single probe beam

N. B E Sawyer; Chung W. See; Michael Geoffrey Somekh

doi:10.1117/12.250795

Differential optical profilometer using a single probe beam

N. B E Sawyer
, Chung W. See
, Michael Geoffrey Somekh

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

Original language	English
Pages (from-to)	69-78
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2782
DOIs	https://doi.org/10.1117/12.250795
Publication status	Published - 1 Dec 2004
Externally published	Yes
Event	Optical Inspection and Micromeasurements - Besancon, France Duration: 10 Jun 1996 → 10 Jun 1996

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.250795

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title = "Differential optical profilometer using a single probe beam",

abstract = "This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.",

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AU - See, Chung W.

AU - Somekh, Michael Geoffrey

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N2 - This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

AB - This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

UR - https://www.scopus.com/pages/publications/78951472319

U2 - 10.1117/12.250795

DO - 10.1117/12.250795

M3 - Conference article

SN - 0277-786X

VL - 2782

SP - 69

EP - 78

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Optical Inspection and Micromeasurements

Y2 - 10 June 1996 through 10 June 1996

ER -

Differential optical profilometer using a single probe beam

Abstract

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