Differential optical profilometer using a single probe beam

N. B E Sawyer, Chung W. See, Michael Geoffrey Somekh

Research output: Journal article publicationConference articleAcademic researchpeer-review

Abstract

This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.
Original languageEnglish
Pages (from-to)69-78
Number of pages10
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume2782
DOIs
Publication statusPublished - 1 Dec 2004
Externally publishedYes
EventOptical Inspection and Micromeasurements - Besancon, France
Duration: 10 Jun 199610 Jun 1996

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

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