Differential optical profilometer using a single probe beam

N. B E Sawyer; Chung W. See; Michael Geoffrey Somekh

doi:10.1117/12.250795

Differential optical profilometer using a single probe beam

N. B E Sawyer, Chung W. See, Michael Geoffrey Somekh

Research output: Journal article publication › Conference article › Academic research › peer-review

Abstract

This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

Original language	English
Pages (from-to)	69-78
Number of pages	10
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	2782
DOIs	https://doi.org/10.1117/12.250795
Publication status	Published - 1 Dec 2004
Externally published	Yes
Event	Optical Inspection and Micromeasurements - Besancon, France Duration: 10 Jun 1996 → 10 Jun 1996

ASJC Scopus subject areas

Applied Mathematics
Computer Science Applications
Electrical and Electronic Engineering
Electronic, Optical and Magnetic Materials
Condensed Matter Physics

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10.1117/12.250795

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@article{9f5e9b3318a84b2a8cc6a61381dc56d5,

title = "Differential optical profilometer using a single probe beam",

abstract = "This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.",

author = "Sawyer, {N. B E} and See, {Chung W.} and Somekh, {Michael Geoffrey}",

year = "2004",

month = dec,

day = "1",

doi = "10.1117/12.250795",

language = "English",

volume = "2782",

pages = "69--78",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Optical Inspection and Micromeasurements ; Conference date: 10-06-1996 Through 10-06-1996",

}

TY - JOUR

T1 - Differential optical profilometer using a single probe beam

AU - Sawyer, N. B E

AU - See, Chung W.

AU - Somekh, Michael Geoffrey

PY - 2004/12/1

Y1 - 2004/12/1

N2 - This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

AB - This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.

UR - http://www.scopus.com/inward/record.url?scp=78951472319&partnerID=8YFLogxK

U2 - 10.1117/12.250795

DO - 10.1117/12.250795

M3 - Conference article

VL - 2782

SP - 69

EP - 78

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Optical Inspection and Micromeasurements

Y2 - 10 June 1996 through 10 June 1996

ER -

Differential optical profilometer using a single probe beam

Abstract

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