Abstract
This paper describes a heterodyne common path differential phase interferometer which is resistant to the thermally and microphonically induced measurement errors of non-common path systems. The system utilizes a single probe beam which is focused onto the sample and then imaged onto the detector plane. Differentiation in any direction can be performed by altering the positions of the detectors. A theoretical derivation of the system transfer function is presented, the results from which show excellent agreement with experimental measurements. Initial theoretical results of the recovery of a sample profile from its differential profile are presented. Finally, a simplified and more stable differential system is introduced.
Original language | English |
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Pages (from-to) | 69-78 |
Number of pages | 10 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 2782 |
DOIs | |
Publication status | Published - 1 Dec 2004 |
Externally published | Yes |
Event | Optical Inspection and Micromeasurements - Besancon, France Duration: 10 Jun 1996 → 10 Jun 1996 |
ASJC Scopus subject areas
- Applied Mathematics
- Computer Science Applications
- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics