Development of RF MEMS switch on flexible organic substrate with wafer Transfer Technology (WTT)

Keyphrases

• Wafer 100%
• Switch-off 100%
• Transfer Technology 100%
• RF MEMS Switch 100%
• Flexible Organic Substrates 100%
• RF System 33%
• Organic Substrate 33%
• Silicon Wafer 33%
• Bottom Electrode 33%
• Low Insertion Loss 33%
• Low Resistivity Silicon 33%
• Top Electrode 33%
• FR-4 33%
• Wet Removal 33%
• Mechanical Grinding 33%
• FR4 Substrate 33%
• High Isolation 33%
• Radio Frequency Microelectromechanical Systems (RF MEMS) 33%
• Metal Bridge 33%
• RF Devices 33%
• MEMS Components 33%
• MEMS Process 33%

Engineering

• Microelectromechanical System 100%
• Insertion Loss 20%
• Mechanical Grinding 20%
• Silicon Wafer 20%