Development of in situ optical–electrical MEMS platform for semiconductor characterization

Keyphrases

• In Situ 100%
• Transmission Electron Microscopy 100%
• Semiconductor Materials Measurements 100%
• MEMS Platforms 100%
• External Stimuli 50%
• Fast-growing 50%
• Optical Measurement 50%
• Electrical Measurements 50%
• Dynamic Response 50%
• Transmission Electron Microscope 50%
• Dynamic Behavior 50%
• Chip-based 50%
• Micro-electro-mechanical Systems 50%
• Optoelectronic Semiconductors 50%
• Working Mechanism 50%
• Clean Energy 50%
• In Situ Transmission Electron Microscopy 50%
• Actual Conditions 50%
• Energy-efficient Communication 50%
• Energy Disposal 50%
• Semiconducting Materials 50%
• System-on-chip 50%
• Microscopy Research 50%
• Pollutant Disposal 50%

Material Science

• Transmission Electron Microscopy 100%
• Microelectromechanical System 100%
• Semiconducting Material 33%