Development of in situ optical–electrical MEMS platform for semiconductor characterization

Songhua Cai, Chenyi Gu, Yifan Wei, Min Gu, Xiaoqing Pan, Peng Wang

Research output: Journal article publicationJournal articleAcademic researchpeer-review

1 Citation (Scopus)


In situ transmission electron microscopy (TEM) technology has become one of the fastest growing areas in TEM research in recent years. This technique allows researchers to investigate the dynamic response of materials to external stimuli inside the microscope. Optoelectronic functional semiconducting materials play an irreplaceable role in several key fields such as clean energy, communications, and pollution disposal. The ability to observe the dynamic behavior of these materials under real working conditions using advanced TEM technologies would provide an in-depth understanding of their working mechanisms, enabling further improvement of their properties. In this work, we designed a microelectromechanical-system-chip-based system to illuminate a sample inside a transmission electron microscope. This system allows simultaneous in situ optical and electrical measurements, which are crucial for optoelectronic semiconductor characterization.

Original languageEnglish
Pages (from-to)57-63
Number of pages7
Publication statusPublished - Nov 2018
Externally publishedYes


  • Biasing
  • In situ
  • MEMS chip
  • Photoelectrical
  • Transmission electron microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Instrumentation


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