Development of a large working range flexure-based 3-DOF micro-parallel manipulator driven by electromagnetic actuators

Shunli Xiao, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

20 Citations (Scopus)


This paper presents the design and analysis of a novel compliant flexure-based micro-parallel positioning stage for micro active vibration isolation application. The stage is constructed with a symmetric structure by employing three parallel PUU legs, a moving platform and a fixed platform. It is driven by 6 electromagnetic actuators and with 3 translational DOFs. The mobility characters of the stage is analyzed and proved via FEA method. The compliance modeling of the stage is conducted by resorting to compliance matrix method, and analytical models for electromagnetic forces are also established, both mechanical structure and electromagnetic model are validated by finite element analysis (FEA) performed with ANSYS. The mechanical structure is analyzed in a multi-physics environmental simulation and electromagnetic actuators are applied in ANSYS too. Both FEA and the analytical models well demonstrate that the movement of the stage is purely translational. The prototype of the designed system is fabricated, preliminary test shows the design is successful. With the parameters designed in the paper, the stage can have large working space, very high resolution and heavy work-load ability as well.
Original languageEnglish
Title of host publication2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Number of pages6
Publication statusPublished - 14 Nov 2013
Externally publishedYes
Event2013 IEEE International Conference on Robotics and Automation, ICRA 2013 - Karlsruhe, Germany
Duration: 6 May 201310 May 2013


Conference2013 IEEE International Conference on Robotics and Automation, ICRA 2013

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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