Development of a 2-DOF micro-motion stage based on lever amplifying mechanism

Kai Zhou; Yangmin Li

doi:10.1109/ICMA.2014.6885675

Development of a 2-DOF micro-motion stage based on lever amplifying mechanism

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

This paper presents a micro planar motion stage based on flexure hinge that allows large ranges of motion along x and y direction. A new type of displacement amplifying mechanism is introduced, which is based on driving and guiding principles of flexible hinges. Not only it is able to amplify linear displacement accurately, but also it has the advantages, like high accuracy in amplifing displacement, good symmetry, no additional displacement. By means of establishing the kinematics model of the mechanism, we can understand the principle of the mechanism and the amplification ratio can be calculated accordingly. Finite element analysis (FEA) is carried out using ANSYS software to analyze all the statics of the mechanism. At last, the reason of 'displacement loss' is analyzed and clarified.

Original language	English
Title of host publication	2014 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014
Publisher	IEEE Computer Society
Pages	78-83
Number of pages	6
ISBN (Print)	9781479939787
DOIs	https://doi.org/10.1109/ICMA.2014.6885675
Publication status	Published - 1 Jan 2014
Externally published	Yes
Event	11th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014 - Tianjin, China Duration: 3 Aug 2014 → 6 Aug 2014

Conference

Conference	11th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014
Country/Territory	China
City	Tianjin
Period	3/08/14 → 6/08/14

Keywords

Finite element analysis
Lever amplification mechanism
Micro stage

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Mechanical Engineering

More information

10.1109/ICMA.2014.6885675

Cite this

@inproceedings{bb4540eb059440698ca39365fe66ebb5,

title = "Development of a 2-DOF micro-motion stage based on lever amplifying mechanism",

abstract = "This paper presents a micro planar motion stage based on flexure hinge that allows large ranges of motion along x and y direction. A new type of displacement amplifying mechanism is introduced, which is based on driving and guiding principles of flexible hinges. Not only it is able to amplify linear displacement accurately, but also it has the advantages, like high accuracy in amplifing displacement, good symmetry, no additional displacement. By means of establishing the kinematics model of the mechanism, we can understand the principle of the mechanism and the amplification ratio can be calculated accordingly. Finite element analysis (FEA) is carried out using ANSYS software to analyze all the statics of the mechanism. At last, the reason of 'displacement loss' is analyzed and clarified.",

keywords = "Finite element analysis, Lever amplification mechanism, Micro stage",

author = "Kai Zhou and Yangmin Li",

year = "2014",

month = jan,

day = "1",

doi = "10.1109/ICMA.2014.6885675",

language = "English",

isbn = "9781479939787",

pages = "78--83",

booktitle = "2014 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014",

publisher = "IEEE Computer Society",

address = "United States",

note = "11th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014 ; Conference date: 03-08-2014 Through 06-08-2014",

}

Zhou, K & Li, Y 2014, Development of a 2-DOF micro-motion stage based on lever amplifying mechanism. in 2014 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014., 6885675, IEEE Computer Society, pp. 78-83, 11th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014, Tianjin, China, 3/08/14. https://doi.org/10.1109/ICMA.2014.6885675

Development of a 2-DOF micro-motion stage based on lever amplifying mechanism. / Zhou, Kai; Li, Yangmin.
2014 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014. IEEE Computer Society, 2014. p. 78-83 6885675.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

TY - GEN

T1 - Development of a 2-DOF micro-motion stage based on lever amplifying mechanism

AU - Zhou, Kai

AU - Li, Yangmin

PY - 2014/1/1

Y1 - 2014/1/1

N2 - This paper presents a micro planar motion stage based on flexure hinge that allows large ranges of motion along x and y direction. A new type of displacement amplifying mechanism is introduced, which is based on driving and guiding principles of flexible hinges. Not only it is able to amplify linear displacement accurately, but also it has the advantages, like high accuracy in amplifing displacement, good symmetry, no additional displacement. By means of establishing the kinematics model of the mechanism, we can understand the principle of the mechanism and the amplification ratio can be calculated accordingly. Finite element analysis (FEA) is carried out using ANSYS software to analyze all the statics of the mechanism. At last, the reason of 'displacement loss' is analyzed and clarified.

AB - This paper presents a micro planar motion stage based on flexure hinge that allows large ranges of motion along x and y direction. A new type of displacement amplifying mechanism is introduced, which is based on driving and guiding principles of flexible hinges. Not only it is able to amplify linear displacement accurately, but also it has the advantages, like high accuracy in amplifing displacement, good symmetry, no additional displacement. By means of establishing the kinematics model of the mechanism, we can understand the principle of the mechanism and the amplification ratio can be calculated accordingly. Finite element analysis (FEA) is carried out using ANSYS software to analyze all the statics of the mechanism. At last, the reason of 'displacement loss' is analyzed and clarified.

KW - Finite element analysis

KW - Lever amplification mechanism

KW - Micro stage

UR - http://www.scopus.com/inward/record.url?scp=84906986087&partnerID=8YFLogxK

U2 - 10.1109/ICMA.2014.6885675

DO - 10.1109/ICMA.2014.6885675

M3 - Conference article published in proceeding or book

SN - 9781479939787

SP - 78

EP - 83

BT - 2014 IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014

PB - IEEE Computer Society

T2 - 11th IEEE International Conference on Mechatronics and Automation, IEEE ICMA 2014

Y2 - 3 August 2014 through 6 August 2014

ER -

Development of a 2-DOF micro-motion stage based on lever amplifying mechanism

Abstract

Conference

Keywords

ASJC Scopus subject areas

More information

Other files and links

Fingerprint

Cite this