Development and control of a compact 3-DOF micromanipulator for high-precise positioning

Xiao Xiao, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

7 Citations (Scopus)


This paper presents a compact 3-DOF micromanipulator, which is a variant of the rigid 3-P(4S) parallel mechanism. Due to the special design, the proposed micromanipulator is compact in structure and large in workspace. Firstly, the design process of the micromanipulator is demonstrated in this paper. Then the mathematical model of the micromanipulator is derived, in which stiffness model of the compliant P(4S) chain and total stiffness of the compliant 3-P(4S)mechanism are calculated. Finally, a prototype of the micromanipulator is fabricated. Three electromagnetic actuators are utilized in this design. Control system based on dSPACE system is established and preliminary experiments are conducted. Both FEA simulation and experimental results reveal that the proposed micromanipulator has a good positioning performance, which is highly desirable in micro/nano manipulation and manufacturing. The main advantages of the micromanipulator are compact in structure, easy to control and non-contact in actuation.
Original languageEnglish
Title of host publicationAIM 2014 - IEEE/ASME International Conference on Advanced Intelligent Mechatronics
Number of pages6
ISBN (Print)9781479957361
Publication statusPublished - 1 Jan 2014
Externally publishedYes
Event2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014 - Besancon, France
Duration: 8 Jul 201411 Jul 2014


Conference2014 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Computer Science Applications
  • Electrical and Electronic Engineering

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