Development and assessment of a novel hydraulic displacement amplifier for piezo-actuated large stroke precision positioning

Hui Tang, Yangmin Li, Xiao Xiao

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

11 Citations (Scopus)

Abstract

In recent years, piezo-actuated micro/nano positioning stages emerge as a significant tool in the nanotechnology. However, the shortcomings of small positioning stroke and hysteresis of piezoelectric actuators have constrained their further development and applications. In this paper, a novel piezo-actuated hydraulic displacement amplifier (PHDA) based on Pascal's law and area differential principle is first proposed aiming to solve the contradictions among positioning stroke, positioning resolution and mechanism dimension in piezo-actuated micro/nano positioning stages. After a series of optimal designs, the proposed PHDA mechanism is fabricated and experimentally tested. In this study, a piezoelectric (PZT) actuator P-840.20 with open-loop travel of 30 μm is employed, the experimental results indicate that the displacement amplification ratio can reach up to 34.6, thus the maximum output displacement can achieve up to around 1.02 mm. Both theoretical derivation and prototype test results testify the well performance of the proposed mechanism. This new amplifier can be widely extended to practical precision manipulation applications in case of large motion range required.
Original languageEnglish
Title of host publication2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Pages1409-1414
Number of pages6
DOIs
Publication statusPublished - 14 Nov 2013
Externally publishedYes
Event2013 IEEE International Conference on Robotics and Automation, ICRA 2013 - Karlsruhe, Germany
Duration: 6 May 201310 May 2013

Conference

Conference2013 IEEE International Conference on Robotics and Automation, ICRA 2013
Country/TerritoryGermany
CityKarlsruhe
Period6/05/1310/05/13

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Artificial Intelligence
  • Electrical and Electronic Engineering

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