Development and assessment of a novel decoupled XY parallel micropositioning platform

Yangmin Li, Qingsong Xu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

107 Citations (Scopus)

Abstract

This paper presents the development and performance assessment procedures for a new XY parallel micropositioning platform (PMP) aiming at a submicrometer accuracy for microscale manipulation. The uniqueness of the proposed microparallel platform lies in that it possesses an uncomplicated structure as well as actuation isolation and output motion decoupling properties, which facilitates the adoption of two single-inputsingle-output controllers. Based on the matrix method, the kinetostatics models of the PMP are established and verified by finite-element analysis. Via system identification, a digital lag - lead compensator is designed to compensate for the hysteresis of each piezoelectric actuator. A feedforward control is then implemented to construct a zero phase error tracking controller. Positioning performance of the PMP in terms of resolution, accuracy, repeatability, and contouring performances of 1-D and 2-D motions has been evaluated by several experimental studies. Experimental results not only validate the effectiveness of the designed controller but also show that both positioning and contouring of the PMP can achieve a submicrometer precision within a specified velocity range.
Original languageEnglish
Article number4914839
Pages (from-to)125-135
Number of pages11
JournalIEEE/ASME Transactions on Mechatronics
Volume15
Issue number1
DOIs
Publication statusPublished - 1 Feb 2010
Externally publishedYes

Keywords

  • Flexure mechanism
  • Micromanipulator
  • Motion control
  • Parallel mechanism
  • Piezoelectric actuation
  • System identification

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Computer Science Applications

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