Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

P. L. Washington; H. C. Ong; Jiyan Dai; R. P.H. Chang

doi:10.1063/1.121617

Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

P. L. Washington, H. C. Ong, Jiyan Dai, R. P.H. Chang

Research output: Journal article publication › Journal article › Academic research › peer-review

178 Citations (Scopus)

Abstract

Spectroscopic ellipsometry (SE) has been used to determine the complex pseudo dielectric functions, ε1(E)+iε2(E), of ZnO films on (0001) Al2O3substrates over the spectral range of 1.33 and 4.96 eV at room temperature. The SE measurements are carried out with E⊥c at angles of incidence of 60° and 65° with respect to the surface normal. Below the band gap, the refractive index n is found to follow the first order Sellmeir dispersion relationship n2(λ)=1+1.881λ2/(λ2-0.05382). A free excitonic structure located at the band edge of 3.32 eV is clearly observed in the pseudo absorption spectrum. Elliott expression with Lorentzian broadening is used to model the pseudo absorption coefficient above the band edge.

Original language	English
Pages (from-to)	3261-3263
Number of pages	3
Journal	Applied Physics Letters
Volume	72
Issue number	25
DOIs	https://doi.org/10.1063/1.121617
Publication status	Published - 1 Dec 1998
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.121617

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title = "Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry",

abstract = "Spectroscopic ellipsometry (SE) has been used to determine the complex pseudo dielectric functions, ε1(E)+iε2(E), of ZnO films on (0001) Al2O3substrates over the spectral range of 1.33 and 4.96 eV at room temperature. The SE measurements are carried out with E⊥c at angles of incidence of 60° and 65° with respect to the surface normal. Below the band gap, the refractive index n is found to follow the first order Sellmeir dispersion relationship n2(λ)=1+1.881λ2/(λ2-0.05382). A free excitonic structure located at the band edge of 3.32 eV is clearly observed in the pseudo absorption spectrum. Elliott expression with Lorentzian broadening is used to model the pseudo absorption coefficient above the band edge.",

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T1 - Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

AU - Washington, P. L.

AU - Ong, H. C.

AU - Dai, Jiyan

AU - Chang, R. P.H.

PY - 1998/12/1

Y1 - 1998/12/1

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AB - Spectroscopic ellipsometry (SE) has been used to determine the complex pseudo dielectric functions, ε1(E)+iε2(E), of ZnO films on (0001) Al2O3substrates over the spectral range of 1.33 and 4.96 eV at room temperature. The SE measurements are carried out with E⊥c at angles of incidence of 60° and 65° with respect to the surface normal. Below the band gap, the refractive index n is found to follow the first order Sellmeir dispersion relationship n2(λ)=1+1.881λ2/(λ2-0.05382). A free excitonic structure located at the band edge of 3.32 eV is clearly observed in the pseudo absorption spectrum. Elliott expression with Lorentzian broadening is used to model the pseudo absorption coefficient above the band edge.

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Determination of the optical constants of zinc oxide thin films by spectroscopic ellipsometry

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