Abstract
Fourier analysis is used to formulize and characterize grating-based displacement transducers. The analysis is carried out for linear and radial binary grating sensors, and for both single and grating-pair sensors. The influence of the grating (pair) structure and the receiving window on sensing sensitivity, linearity of response and dynamic range is investigated. Several types of photoresist grating are fabricated and are used to experimentally characterize the grating sensor. The tested result is found to be in general agreement with the analysis result.
| Original language | English |
|---|---|
| Pages (from-to) | 308-315 |
| Number of pages | 8 |
| Journal | Nanotechnology |
| Volume | 12 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - Sept 2001 |
| Externally published | Yes |
| Event | 8th Foresight Conference on Molecular Nanotechnology - Bethesda, MR, United States Duration: 2 Nov 2000 → 5 Nov 2000 |
ASJC Scopus subject areas
- Bioengineering
- General Chemistry
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering