Design optimization of vibration isolation system through minimization of vibration power flow

Shilin Xie, Siu Wing Or, Helen Lai Wa Chan, Ping Kong Choy, Peter Chou Kee Liu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

A vibration power minimization model is developed, based on the mobility matrix method, for a vibration isolation system consisting of a vibrating source placed on an elastic support structure through multiple resilient mounts. This model is applied to investigate the design optimization of an X-Y motion stage-based vibration isolation system used in semiconductor wire-bonding equipment. By varying the stiffness coefficients of the resilient mounts while constraining the dynamic displacement amplitudes of the X-Y motion stage, the total power flow from the X-Y motion stage (the vibrating source) to the equipment table (the elastic support structure) is minimized at each frequency interval in the concerned frequency range for different stiffnesses of the equipment table. The results show that when the equipment table is relatively flexible, the optimal design based on the proposed vibration power minimization model gives significantly little power flow than that obtained using a conventional vibration force minimization model at some critical frequencies. When the equipment table is rigid enough, both models provide almost the same predictions on the total power flow.
Original languageEnglish
Pages (from-to)677-694
Number of pages18
JournalStructural Engineering and Mechanics
Volume28
Issue number6
DOIs
Publication statusPublished - 20 Apr 2008

Keywords

  • Design optimization
  • Elastic support structure
  • Power flow
  • Vibration isolation

ASJC Scopus subject areas

  • Civil and Structural Engineering
  • Building and Construction
  • Mechanics of Materials
  • Mechanical Engineering

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