@inproceedings{15c9e99b76634b3c9e3b86dee3f8478e,
title = "Design of a three DOFs MEMS-based precision manipulator",
abstract = "This paper presents a novel design of a three degrees of freedom (DOFs) MEMS-based precision manipulator. The purpose of the manipulator is to position a microscope tool on the work plate doing small movement tasks. A parallel kinematic mechanism with three legs is used to convert the motion of longitudinal comb-drives into three direction translations at the end-effector. Each leg has three joints (a prismatic joint and two universal joints) which consists the basic structure of the design. The manipulator design has a high actuation flexibility combined with a relatively high stiffness due to its structure and materials. A theoretical calculation is revealed to show inverse kinematics and stiffness analysis of the design.",
keywords = "Inverse kinematics, Manipulator, MEMS, Parallel robot",
author = "Zhongzhe Chi and Min Pan and Dan Zhang",
year = "2011",
doi = "10.1109/RVSP.2011.34",
language = "English",
isbn = "9780769545813",
series = "Proceedings - 1st International Conference on Robot, Vision and Signal Processing, RVSP 2011",
pages = "14--17",
booktitle = "Proceedings - 1st International Conference on Robot, Vision and Signal Processing, RVSP 2011",
note = "1st International Conference on Robot, Vision and Signal Processing, RVSP 2011 ; Conference date: 21-11-2011 Through 23-11-2011",
}