Design of a piezoelectric-hydraulic pump with active valves

Dong Gun Lee, Siu Wing Or, Gregory P. Carman

Research output: Journal article publicationJournal articleAcademic researchpeer-review

70 Citations (Scopus)


The design of a piezoelectric-hydraulic pump with innovative active valves is presented in this study. The pump structure consists of a piezoelectric stack actuator and two piezoelectric unimorph disc valves acting as inlet and delivery valves. The pump actuation mechanism is composed of a pumping chamber and a diaphragm attached to the piezoelectric stack actuator. Static and dynamic piezoelectric finite element analyses have been used to maximize the delivered fluid volume per stroke and to predict the dynamic behavior, respectively. A structural optimization technique has been employed to optimize the pump's efficiency for specific geometrical dimensions. A transient computational fluid dynamics (CFD) model has been utilized to predict flow rates. Dynamic experiments have also been conducted and results are in good agreement with those obtained from simulations.
Original languageEnglish
Pages (from-to)107-116
Number of pages10
JournalJournal of Intelligent Material Systems and Structures
Issue number2
Publication statusPublished - 1 Feb 2004
Externally publishedYes


  • Computational fluid dynamics (CFD)
  • Design optimization
  • Diaphragm
  • Finite element analysis (FEA)
  • Piezoelectric stack actuator
  • Piezoelectric unimorph disc valves
  • Piezoelectric-hydraulic pump

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanical Engineering

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