Design of a partially decoupled high precision XYZ compliant parallel micromanipulator

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

11 Citations (Scopus)

Abstract

A newly designed three-degree-of-freedom compliant parallel micromanipulator (CPM) with partially decoupled characteristics of XYZ translational motion is proposed in this paper. The CPM is driven by the selected piezoelectric actuators (PZTs) whose strokes are amplified by using the amplification lever mechanism. The design procedure of the CPM is presented in detail, and the CPM parasitic motion is studied analytically. Moreover, its motion properties are verified through the finite element analysis conducted with ANSYS software package. The simulation results reveal that the CPM has negligible parasitic rotations and negligible parasitic translation along one direction, and it possesses a good decoupled property. The CPM is expected to be applied to operate the objects in micro/nano-meter scales with high precision.
Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages13-18
Number of pages6
DOIs
Publication statusPublished - 1 Sep 2008
Externally publishedYes
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 6 Jan 20089 Jan 2008

Conference

Conference3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Country/TerritoryChina
CitySanya
Period6/01/089/01/08

Keywords

  • Decoupled motion
  • Design theory
  • Flexure hinges
  • Parallel manipulators

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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