Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure

Keyphrases

• Compact Structure 100%
• Parallelogram Flexure 100%
• Nanopositioning Stage 100%
• Design Procedure 50%
• Finite Element Analysis 50%
• ANSYS 50%
• Stiffness Ratio 50%
• Actuation 50%
• Matrix Method 50%
• Micro-nano 50%
• Compliant Parallel Micromanipulator 50%
• Nanoscale Manipulation 50%
• Flexure-based 50%
• Decoupling Property 50%
• Parallel Kinematics 50%
• Input-output Decoupling 50%
• Transverse Stiffness 50%
• Amplification Ratio 50%

Engineering

• Flexure 100%
• Design Procedure 33%
• Stiffness Ratio 33%
• Decoupling Property 33%
• Amplification Ratio 33%
• Actuation 33%
• Nanoscale 33%
• Finite Element Analysis 33%
• Matrix Method 33%