Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure

Qingsong Xu; Yangmin Li

doi:10.1109/ROBIO.2009.5420835

Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

7 Citations (Scopus)

Abstract

The design procedure for a new decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage is presented in this paper. The designed XYZ stage owns a compact structure constructed by three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by the actuation isolation which is enabled by the double compound parallelogram flexure with large transverse stiffness. The modeling for the output compliance, input stiffness, and amplification ratio of the XYZ stage are conducted by resorting to the matrix method, which are validated by the finite element analysis performed with ANSYS. The presented results are helpful for the design of a new XYZ compliant parallel micromanipulator for micro/nano scale manipulation.

Original language	English
Title of host publication	2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009
Pages	901-906
Number of pages	6
DOIs	https://doi.org/10.1109/ROBIO.2009.5420835
Publication status	Published - 1 Dec 2009
Externally published	Yes
Event	2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009 - Guilin, China Duration: 19 Dec 2009 → 23 Dec 2009

Conference

Conference	2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009
Country/Territory	China
City	Guilin
Period	19/12/09 → 23/12/09

ASJC Scopus subject areas

Computer Vision and Pattern Recognition
Human-Computer Interaction
Biomaterials

More information

10.1109/ROBIO.2009.5420835

Cite this

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abstract = "The design procedure for a new decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage is presented in this paper. The designed XYZ stage owns a compact structure constructed by three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by the actuation isolation which is enabled by the double compound parallelogram flexure with large transverse stiffness. The modeling for the output compliance, input stiffness, and amplification ratio of the XYZ stage are conducted by resorting to the matrix method, which are validated by the finite element analysis performed with ANSYS. The presented results are helpful for the design of a new XYZ compliant parallel micromanipulator for micro/nano scale manipulation.",

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Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure. / Xu, Qingsong; Li, Yangmin.
2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009. 2009. p. 901-906 5420835.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure

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ASJC Scopus subject areas

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