Design of a new decoupled XYZ compliant parallel micropositioning stage with compact structure

Qingsong Xu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

6 Citations (Scopus)

Abstract

The design procedure for a new decoupled flexure-based XYZ compliant parallel-kinematics micropositioning stage is presented in this paper. The designed XYZ stage owns a compact structure constructed by three monolithic limbs and has both input and output decoupling properties. The output decoupling is allowed by the employment of a proposed 2-D compound parallelogram flexure, and the input decoupling is implemented by the actuation isolation which is enabled by the double compound parallelogram flexure with large transverse stiffness. The modeling for the output compliance, input stiffness, and amplification ratio of the XYZ stage are conducted by resorting to the matrix method, which are validated by the finite element analysis performed with ANSYS. The presented results are helpful for the design of a new XYZ compliant parallel micromanipulator for micro/nano scale manipulation.
Original languageEnglish
Title of host publication2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009
Pages901-906
Number of pages6
DOIs
Publication statusPublished - 1 Dec 2009
Externally publishedYes
Event2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009 - Guilin, China
Duration: 19 Dec 200923 Dec 2009

Conference

Conference2009 IEEE International Conference on Robotics and Biomimetics, ROBIO 2009
Country/TerritoryChina
CityGuilin
Period19/12/0923/12/09

ASJC Scopus subject areas

  • Computer Vision and Pattern Recognition
  • Human-Computer Interaction
  • Biomaterials

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