Design of a high sensitivity capacitive force sensor

Keyphrases

• 6-DOF Manipulator 50%
• Capacitance Change 50%
• Capacitive Force Sensor 100%
• Capacitive Sensor 50%
• COMSOL 50%
• Displacement Reduction 100%
• Evaluation Board 50%
• Fabrication Methods 50%
• Finite Element Software 50%
• Force Input 50%
• High Sensitivity 100%
• Maximum Force 50%
• MEMS-based 50%
• Micro-force Measurement 50%
• Overall Dimensions 50%
• Reduction Mechanism 50%
• Reduction Rate 50%
• Sensing Structure 50%
• Sensor Design 50%

Engineering

• Capacitive 100%
• Experimental Result 50%
• Finite Element Analysis 50%
• Manipulator 50%
• Microelectromechanical System 50%
• Reduction Mechanism 50%
• Reduction Ratio 50%
• Simulation Result 50%

Material Science

• Capacitance 100%
• Finite Element Methods 100%
• Microelectromechanical System 100%