Design of a compliant XY stage with embedded force sensor for micro-scale positioning

Qiaokang Liang; Dan Zhang; Quanjun Song; Yunjian Ge

doi:10.1109/ICINFA.2010.5512269

Design of a compliant XY stage with embedded force sensor for micro-scale positioning

Qiaokang Liang, Dan Zhang, Quanjun Song, Yunjian Ge

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

7 Citations (Scopus)

Abstract

This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.

Original language	English
Title of host publication	2010 IEEE International Conference on Information and Automation, ICIA 2010
Pages	1494-1499
Number of pages	6
DOIs	https://doi.org/10.1109/ICINFA.2010.5512269
Publication status	Published - 2010
Externally published	Yes
Event	2010 IEEE International Conference on Information and Automation, ICIA 2010 - Harbin, Heilongjiang, China Duration: 20 Jun 2010 → 23 Jun 2010

Publication series

Name	2010 IEEE International Conference on Information and Automation, ICIA 2010

Conference

Conference	2010 IEEE International Conference on Information and Automation, ICIA 2010
Country/Territory	China
City	Harbin, Heilongjiang
Period	20/06/10 → 23/06/10

Keywords

Flexure mechanism
Micro-scale positioning
Optimization design
Piezoelectric actuation

ASJC Scopus subject areas

Information Systems
Control and Systems Engineering

More information

10.1109/ICINFA.2010.5512269

Cite this

Liang, Q., Zhang, D., Song, Q., & Ge, Y. (2010). Design of a compliant XY stage with embedded force sensor for micro-scale positioning. In 2010 IEEE International Conference on Information and Automation, ICIA 2010 (pp. 1494-1499). Article 5512269 (2010 IEEE International Conference on Information and Automation, ICIA 2010). https://doi.org/10.1109/ICINFA.2010.5512269

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abstract = "This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.",

keywords = "Flexure mechanism, Micro-scale positioning, Optimization design, Piezoelectric actuation",

author = "Qiaokang Liang and Dan Zhang and Quanjun Song and Yunjian Ge",

year = "2010",

doi = "10.1109/ICINFA.2010.5512269",

language = "English",

isbn = "9781424457021",

series = "2010 IEEE International Conference on Information and Automation, ICIA 2010",

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Liang, Q, Zhang, D, Song, Q & Ge, Y 2010, Design of a compliant XY stage with embedded force sensor for micro-scale positioning. in 2010 IEEE International Conference on Information and Automation, ICIA 2010., 5512269, 2010 IEEE International Conference on Information and Automation, ICIA 2010, pp. 1494-1499, 2010 IEEE International Conference on Information and Automation, ICIA 2010, Harbin, Heilongjiang, China, 20/06/10. https://doi.org/10.1109/ICINFA.2010.5512269

Design of a compliant XY stage with embedded force sensor for micro-scale positioning. / Liang, Qiaokang; Zhang, Dan; Song, Quanjun et al.
2010 IEEE International Conference on Information and Automation, ICIA 2010. 2010. p. 1494-1499 5512269 (2010 IEEE International Conference on Information and Automation, ICIA 2010).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AB - This paper presents the development of a micro-scale positioning device based on two degrees of freedom (DOF) plane compliant parallel mechanism, which is featured by piezo-driven actuators and flexure joints, integrated force/torque sensor that capable of delivering 2-DOF motions with high precision and providing real-time force/torque or position information for feedback control. With optimization design, the proper parameters of the proposed structure and flexure joints are chosen. The stage possesses high precision and resolution, configurational simplicity and compactness. And the embedded sensor possesses the advantages such as, isotropic and high sensitivity.

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Design of a compliant XY stage with embedded force sensor for micro-scale positioning

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Keywords

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