Design, modeling, control and experiment for a 2-DOF compliant micro-motion stage

Yangmin Li, Shunli Xiao, Longquan Xi, Zhigang Wu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

58 Citations (Scopus)

Abstract

A new XY micro-motion stage is proposed with the double four-bar prismatic joints to transfer linear motions and mechanical displacement amplifier. The compliance models of the amplifier, the prismatic joints, and the whole stage are established based on the flexibility matrix method. The simulation is made by using finite element analysis ANSYS software. The output cross-talk is about 2% and the parasitic motions of the input points in the other limbs are less than 1.8%, which shows a good decoupling property. The mechanical prototype is fabricated, the experimental results show that the input/output of the stage has a very good linearity, the ratio of output displacement to input displacement is 5.06 and the working range is 156 μm × 156 μm. To tackle for the serious hysteresis nonlinear problems of the stage, model reference adaptive PID controller is designed, the final resolution can reach ±0.2 μm.
Original languageEnglish
Pages (from-to)735-744
Number of pages10
JournalInternational Journal of Precision Engineering and Manufacturing
Volume15
Issue number4
DOIs
Publication statusPublished - 1 Jan 2014
Externally publishedYes

Keywords

  • Compliance matrix method
  • Double four-bar prismatic joints
  • Finite element analysis
  • Model reference adaptive PID

ASJC Scopus subject areas

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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