Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation

Keyphrases

• Micromanipulator 100%
• Parallel Micromanipulator 100%
• Piezo Actuation 100%
• Visual Servo Control 100%
• Design Procedure 33%
• Positioning Accuracy 33%
• Two Dimensional 33%
• Dimensional Optimization 33%
• Mathematical Model 33%
• Finite Element Analysis 33%
• Kinematics 33%
• Full Designs 33%
• Manipulator 33%
• Workspace 33%
• Accuracy Improvement 33%
• Particle Swarm Optimization Algorithm 33%
• Pseudo-rigid-body Model 33%
• Flexure Hinge 33%
• PD Controller 33%
• Vision System 33%
• XY Stage 33%
• Parallel Kinematics 33%
• Decoupled Motion 33%
• Simplification Approaches 33%
• Positioning Repeatability 33%
• Two-dimensional Positioning 33%
• Development Procedure 33%
• Micromanipulation 33%
• Microscope Vision 33%
• Piezoelectric Actuation 33%

Engineering

• Two Dimensional 100%
• Actuation 100%
• Servo Control 100%
• Optimization Method 50%
• Piezoelectric 50%
• Repeatability 50%
• Flexure Hinge 50%
• Micromanipulation 50%
• Accuracy Improvement 50%
• Joints (Structural Components) 50%
• Manipulator 50%
• Dimension Optimization 50%
• Rigid Structure 50%
• Particle Swarm Optimization 50%
• Mathematical Model 50%
• Finite Element Analysis 50%