Abstract
This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator.
Original language | English |
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Article number | 5161352 |
Pages (from-to) | 710-719 |
Number of pages | 10 |
Journal | IEEE Transactions on Automation Science and Engineering |
Volume | 6 |
Issue number | 4 |
DOIs | |
Publication status | Published - 1 Oct 2009 |
Externally published | Yes |
Keywords
- Flexure mechanism
- Micromanipulation
- Motion control
- Parallel mechanism
- Piezoelectric actuation
- Visual servoing
ASJC Scopus subject areas
- Control and Systems Engineering
- Electrical and Electronic Engineering