Design, fabrication, and visual servo control of an xy parallel micromanipulator with piezo-actuation

Qingsong Xu, Yangmin Li, Ning Xi

Research output: Journal article publicationJournal articleAcademic researchpeer-review

58 Citations (Scopus)


This paper presents a complete design and development procedure of a new XY micromanipulator for two-dimensional (2-D) micromanipulation applications. The manipulator possesses both a nearly decoupled motion and a simple structure, which is featured with parallel-kinematic architecture, flexure hinge-based joints, and piezoelectric actuation. Based on pseudo-rigid-body (PRB) simplification approach, the mathematical models predicting kinematics, statics, and dynamics of the XY stage have been obtained, which are verified by the finite-element analysis (FEA) and then integrated into dimension optimization via the particle swarm optimization (PSO) method. Moreover, a prototype of the micromanipulator is fabricated and calibrated using a microscope vision system, and visual servo control employing a modified PD controller is implemented for the accuracy improvement. The experiments discover that a workspace size of 260 μm × 260 μm with a 2-D positioning accuracy and repeatability around 0.73 and 1.02 μm respectively, can be achieved by the micromanipulator.
Original languageEnglish
Article number5161352
Pages (from-to)710-719
Number of pages10
JournalIEEE Transactions on Automation Science and Engineering
Issue number4
Publication statusPublished - 1 Oct 2009
Externally publishedYes


  • Flexure mechanism
  • Micromanipulation
  • Motion control
  • Parallel mechanism
  • Piezoelectric actuation
  • Visual servoing

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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