Design, comparison and analysis of a novel 3-D decoupling micromanipulator with different numbers of S-joints

Zhigang Wu, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review


In this paper, the XYZ translational parallel micromanipulator with three-dimension is proposed. The whole mechanism is fully symmetric about x and y axes. The end-effector with the centre of the plane may acquire the ideal effect according to using the different number of S-hinges (spherical hinge with three degrees of freedom). Therefore, the four types of mechanisms with different numbers of S-hinges are analyzed and designed. The output displacements in the x and y directions are found that there are not much impact, but the influence in the z direction is different for four kinds of S-hinges. A comparison is made for the kinematics performances and decoupling characteristics of the different micromanipulators, and then the best one can be selected as the mechanism. The workspaces for the micromanipulator can be produced at last. According to results of the analysis with the ANSYS software, the errors for the x, y and z directions are lower than 2%, and the displacement loss is about 15% in the x and y directions, so the kinematic performances of the novel stage are validated.
Original languageEnglish
Title of host publicationProceedings of the IEEE Conference on Nanotechnology
Number of pages6
ISBN (Electronic)9781479956227
Publication statusPublished - 26 Nov 2014
Externally publishedYes
Event2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 - Toronto, Canada
Duration: 18 Aug 201421 Aug 2014


Conference2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science Applications
  • Modelling and Simulation
  • Instrumentation

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