Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology

H. G. Teo; J. Singh; C. Lu; A. Q. Liu

doi:10.1109/DTIP.2003.1287022

Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology

H. G. Teo
, J. Singh
, C. Lu
, A. Q. Liu

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

Abstract

Evolving optical transport networks of wavelength-division-multiplexed (WDM) systems has lead to rapid growth in demand for functions inside the optical layer to manipulate traffic on the wavelength basis. In this paper, a novel method to make in-plane reactive-ion-etching (RIE) micro-electro-mechanical systems (MEMS) optical switch devices in optical communication easier and better is explored, through nano fabrication technology, with the integration of nano photonic-bandgap (PBG) crystal waveguides to improve the performance of MEMS optical-cross-connects (OXCs).

Original language	English
Title of host publication	DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003
Editors	Bernard Courtois, Jean Michel Karam, Jan Korvink, Karen Markus, Keren Bergman, Bernd Michel
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	127-130
Number of pages	4
ISBN (Electronic)	078037066X, 9780780370661
DOIs	https://doi.org/10.1109/DTIP.2003.1287022
Publication status	Published - Apr 2003
Externally published	Yes
Event	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 - Cannes, France Duration: 5 May 2003 → 7 May 2003

Publication series

Name	DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Conference

Conference	5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003
Country/Territory	France
City	Cannes
Period	5/05/03 → 7/05/03

Keywords

Integrated optics
Micromechanical devices
Optical design
Optical fiber networks
Optical waveguides
Photonic crystals
Telecommunication traffic
Traffic control
Wavelength division multiplexing
WDM networks

ASJC Scopus subject areas

Industrial and Manufacturing Engineering
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

More information

10.1109/DTIP.2003.1287022

Cite this

Teo, H. G., Singh, J., Lu, C., & Liu, A. Q. (2003). Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology. In B. Courtois, J. M. Karam, J. Korvink, K. Markus, K. Bergman, & B. Michel (Eds.), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003 (pp. 127-130). Article 1287022 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2003.1287022

Teo, H. G. ; Singh, J. ; Lu, C. et al. / Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology. DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. editor / Bernard Courtois ; Jean Michel Karam ; Jan Korvink ; Karen Markus ; Keren Bergman ; Bernd Michel. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 127-130 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003).

@inproceedings{e7bf8e546f3147deabea5c07a768ef7e,

title = "Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology",

abstract = "Evolving optical transport networks of wavelength-division-multiplexed (WDM) systems has lead to rapid growth in demand for functions inside the optical layer to manipulate traffic on the wavelength basis. In this paper, a novel method to make in-plane reactive-ion-etching (RIE) micro-electro-mechanical systems (MEMS) optical switch devices in optical communication easier and better is explored, through nano fabrication technology, with the integration of nano photonic-bandgap (PBG) crystal waveguides to improve the performance of MEMS optical-cross-connects (OXCs).",

keywords = "Integrated optics, Micromechanical devices, Optical design, Optical fiber networks, Optical waveguides, Photonic crystals, Telecommunication traffic, Traffic control, Wavelength division multiplexing, WDM networks",

author = "Teo, \{H. G.\} and J. Singh and C. Lu and Liu, \{A. Q.\}",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 ; Conference date: 05-05-2003 Through 07-05-2003",

year = "2003",

month = apr,

doi = "10.1109/DTIP.2003.1287022",

language = "English",

series = "DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "127--130",

editor = "Bernard Courtois and Karam, \{Jean Michel\} and Jan Korvink and Karen Markus and Keren Bergman and Bernd Michel",

booktitle = "DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003",

}

Teo, HG, Singh, J, Lu, C & Liu, AQ 2003, Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology. in B Courtois, JM Karam, J Korvink, K Markus, K Bergman & B Michel (eds), DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003., 1287022, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003, Institute of Electrical and Electronics Engineers Inc., pp. 127-130, 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003, Cannes, France, 5/05/03. https://doi.org/10.1109/DTIP.2003.1287022

Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology. / Teo, H. G.; Singh, J.; Lu, C. et al.
DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. ed. / Bernard Courtois; Jean Michel Karam; Jan Korvink; Karen Markus; Keren Bergman; Bernd Michel. Institute of Electrical and Electronics Engineers Inc., 2003. p. 127-130 1287022 (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003).

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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PY - 2003/4

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N2 - Evolving optical transport networks of wavelength-division-multiplexed (WDM) systems has lead to rapid growth in demand for functions inside the optical layer to manipulate traffic on the wavelength basis. In this paper, a novel method to make in-plane reactive-ion-etching (RIE) micro-electro-mechanical systems (MEMS) optical switch devices in optical communication easier and better is explored, through nano fabrication technology, with the integration of nano photonic-bandgap (PBG) crystal waveguides to improve the performance of MEMS optical-cross-connects (OXCs).

AB - Evolving optical transport networks of wavelength-division-multiplexed (WDM) systems has lead to rapid growth in demand for functions inside the optical layer to manipulate traffic on the wavelength basis. In this paper, a novel method to make in-plane reactive-ion-etching (RIE) micro-electro-mechanical systems (MEMS) optical switch devices in optical communication easier and better is explored, through nano fabrication technology, with the integration of nano photonic-bandgap (PBG) crystal waveguides to improve the performance of MEMS optical-cross-connects (OXCs).

KW - Integrated optics

KW - Micromechanical devices

KW - Optical design

KW - Optical fiber networks

KW - Optical waveguides

KW - Photonic crystals

KW - Telecommunication traffic

KW - Traffic control

KW - Wavelength division multiplexing

KW - WDM networks

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M3 - Conference article published in proceeding or book

AN - SCOPUS:84945973347

T3 - DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

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BT - DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

A2 - Courtois, Bernard

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A2 - Korvink, Jan

A2 - Markus, Karen

A2 - Bergman, Keren

A2 - Michel, Bernd

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003

Y2 - 5 May 2003 through 7 May 2003

ER -

Teo HG, Singh J, Lu C , Liu AQ. Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology. In Courtois B, Karam JM, Korvink J, Markus K, Bergman K, Michel B, editors, DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003. Institute of Electrical and Electronics Engineers Inc. 2003. p. 127-130. 1287022. (DTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003). doi: 10.1109/DTIP.2003.1287022

Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology

Abstract

Publication series

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Keywords

ASJC Scopus subject areas

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