Design and simulation of MEMS optical crossconnect with integrated nanophotonic crystals technology

H. G. Teo, J. Singh, C. Lu, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

Abstract

Evolving optical transport networks of wavelength-division-multiplexed (WDM) systems has lead to rapid growth in demand for functions inside the optical layer to manipulate traffic on the wavelength basis. In this paper, a novel method to make in-plane reactive-ion-etching (RIE) micro-electro-mechanical systems (MEMS) optical switch devices in optical communication easier and better is explored, through nano fabrication technology, with the integration of nano photonic-bandgap (PBG) crystal waveguides to improve the performance of MEMS optical-cross-connects (OXCs).

Original languageEnglish
Title of host publicationDTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003
EditorsBernard Courtois, Jean Michel Karam, Jan Korvink, Karen Markus, Keren Bergman, Bernd Michel
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages127-130
Number of pages4
ISBN (Electronic)078037066X, 9780780370661
DOIs
Publication statusPublished - Apr 2003
Externally publishedYes
Event5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003 - Cannes, France
Duration: 5 May 20037 May 2003

Publication series

NameDTIP 2003 - Design, Test, Integration and Packaging of MEMS/MOEMS 2003

Conference

Conference5th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003, DTIP 2003
Country/TerritoryFrance
CityCannes
Period5/05/037/05/03

Keywords

  • Integrated optics
  • Micromechanical devices
  • Optical design
  • Optical fiber networks
  • Optical waveguides
  • Photonic crystals
  • Telecommunication traffic
  • Traffic control
  • Wavelength division multiplexing
  • WDM networks

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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