Abstract
A kind of bulk micromachined gyroscope with novel structure and high sensitivity was simulated and designed. The differential drive eliminated the effect of asymmetric-electrostatic force distribution on the sensitivity. The structure dimensions of the gyroscope were optimized using finite element method (FEM). The analysis results obtained from simulation were that the drive mode frequency was 5.2 kHz, the detecting mode frequency was 5.187 kHz and the match coefficient R was approximately 0.25%. The mechanical coupling between drive mode and detection mode was eliminated, and the frequency mismatch was reduced by the structure.
| Original language | English |
|---|---|
| Pages (from-to) | 1196-1199 |
| Number of pages | 4 |
| Journal | Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology |
| Volume | 37 |
| Issue number | 9 |
| Publication status | Published - Sept 2005 |
| Externally published | Yes |
Keywords
- Coupling
- Finite element method
- Micromachined gyroscope
ASJC Scopus subject areas
- General Engineering