Design and optimization of full decoupled micro/nano-positioning stage based on mathematical calculation

Zhigang Wu, Yangmin Li, Min Hu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

7 Citations (Scopus)

Abstract

Nano-positioning is widely used in Micro-electromechanical Systems (MEMS), micromanipulator and biomedicine, coupling errors and tiny output displacements are the main disadvantages of the one. A totally uncoupled micro/nano-positioning stage with lever amplifiers is designed and tested in this paper. It is fully symmetrical along with the x- and y-directions. For obtaining large output displacements, two fully symmetric two-stage lever displacement amplifiers are utilized to amplify output displacements of piezoelectric actuators (PZTs). The established models for performances evaluation of the stage, in terms of kinetostatics, amplification ratio, reachable workspace, the input and output stiffness, are verified by finite element analysis (FEA). After that, the dimensional optimization is also carried out through the genetic optimization algorithm.The prototype of the mechanism is fabricated by using Wire-Electrical-Discharge-Machining (WEDM) process. Testing results indicate that the proposed micromanipulator demonstrates good performance.

Original languageEnglish
Pages (from-to)417-429
Number of pages13
JournalMechanical Sciences
Volume9
Issue number2
DOIs
Publication statusPublished - 17 Jul 2018

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Civil and Structural Engineering
  • Mechanics of Materials
  • Mechanical Engineering
  • Fluid Flow and Transfer Processes
  • Industrial and Manufacturing Engineering

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