Design and optimization of an XYZ parallel micromanipulator with flexure hinges

Yangmin Li, Qingsong Xu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

63 Citations (Scopus)


In this paper, a nearly decoupled XYZ translational compliant parallel micromanipulator (CPM) is designed for micro/nano scale manipulation with features of piezo-driven actuators and flexure hinges. The CPM structure improvement is made to enlarge the workspace and eliminate or reduce the stress stiffening, buckling phenomenon, and parasitic motions of the original XYZ CPM, which leads to a new CPM with a more compact structure. The CPM kinematics, parasitic motions, and workspace are determined analytically, and the mathematical models describing statics and dynamics of the CPM are established to evaluate its related performances, which are verified by the finite element analysis (FEA) undertaken in ANSYS environment. Based on the analytic models, the CPM dimensions have been optimized by resorting to the particle swarm optimization (PSO) approach, which produces a CPM having minimum parasitic motions and satisfying other performance specifications as validated by the FEA simulations.
Original languageEnglish
Pages (from-to)377-402
Number of pages26
JournalJournal of Intelligent and Robotic Systems: Theory and Applications
Issue number4-5
Publication statusPublished - 1 Aug 2009
Externally publishedYes


  • Flexure hinge
  • Optimum design
  • Parallel manipulator
  • Particle swarm optimization (PSO)
  • Precision machine
  • Robotic modeling

ASJC Scopus subject areas

  • Artificial Intelligence
  • Software
  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Industrial and Manufacturing Engineering
  • Mechanical Engineering


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