Keyphrases
Actuator
100%
Electromagnetic Actuator
100%
Valveless
100%
FEA Software
100%
Impedance Pump
100%
Diaphragm Deflection
66%
Microcoil
66%
Electroplating
33%
ANSYS
33%
Plane Structure
33%
Glass Substrate
33%
Permanent Magnet
33%
Diaphragm
33%
Compression Force
33%
Ongoing Development
33%
Mechanical Integrity
33%
Electroplated Cu
33%
Magnetic Force
33%
Micropump
33%
PDMS Diaphragm
33%
Lab-on-a-chip System
33%
Ansoft
33%
Flexible PDMS
33%
Flexible Diaphragm
33%
MEMS-based
33%
Micro-impedance
33%
Output Flow
33%
Engineering
Diaphragm
100%
Actuator
100%
Finite Element Analysis
60%
Good Agreement
20%
Simulation Result
20%
Micropump
20%
Output Flow Rate
20%
Microelectromechanical System
20%
Magnetic Force
20%
Permanent Magnet
20%
Glass Substrate
20%