Design and modeling of electromagnetic actuator in mems-based valveless impedance pump

Hsien Tsung Chang, Chia Yen Lee, Chih-yung Wen

Research output: Journal article publicationJournal articleAcademic researchpeer-review

36 Citations (Scopus)


This study models and optimizes the electromagnetic actuator in an MEMS-based valveless impedance pump. The actuator comprises an electroplated permanent magnet mounted on a flexible PDMS diaphragm and electroplated Cu coils located on a glass substrate. In optimizing the design of the actuator, the objective is to maximize the output flow rate of the micropump while maintaining the mechanical integrity of its constituent parts. The study commences by developing optimized theoretical models for each of the components within the actuator, namely the diaphragm, the magnet, and the micro-coils. The theoretical models are then verified numerically using FEA software. The magnitude of the magnetic force acting on the flexible diaphragm is calculated using Ansoft/Maxwell3D FEA software. The simulation results obtained by ANSYS FEA software for the diaphragm deflection are found to be in good agreement with the theoretical predictions. In general, the results show that the desired diaphragm deflection of 15μm can be obtained by passing a current of 0.6-0.7A through the micro-coil to produce a compression force of 11μN. The valveless micro impedance pump proposed in this study is easily fabricated and is readily integrated with existing biomedical chips due to its plane structure. The results of this study provide a valuable contribution to the ongoing development of Lab-on-a Chip systems.
Original languageEnglish
Pages (from-to)1615-1622
Number of pages8
JournalMicrosystem Technologies
Issue number11-12
Publication statusPublished - 1 Jul 2007
Externally publishedYes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation


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