Design and fabrication of novel micro electromagnetic actuator

Chia Yen Lee, Zgen Hui Chen, Hsien Tseng Chang, Chih-yung Wen, Chiang Ho Cheng

Research output: Journal article publicationJournal articleAcademic researchpeer-review

18 Citations (Scopus)


This study designs, fabricates, and characterizes a novel micro electromagnetic actuator comprising a PDMS diaphragm, a polyimide-coated copper micro coil, and a permanent magnet. When an electrical current is passed through the micro coil, a magnetic force is induced between the coil and the magnet which causes the diaphragm to deflect, thereby creating an actuation effect. The experimental results demonstrate that the diaphragm deflection can be accurately controlled by regulating the current passed through the micro coil. It is shown that the maximum diaphragm deflection within elastic limits is 150 μm; obtained by passing a current of 0.6 A through a micro coil with a line width of 100 μm. The micro actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
Original languageEnglish
Pages (from-to)1171-1177
Number of pages7
JournalMicrosystem Technologies
Issue number8
Publication statusPublished - 1 Aug 2009
Externally publishedYes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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