Design and fabrication of micro hot-wire flow sensor using 0.35μm CMOS MEMS technology

Zhuonan Miao, Christopher Y.H. Chao, Yi Chiu, Chia Wei Lin, Yi Kuen Lee

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

10 Citations (Scopus)

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Keyphrases

Engineering

Chemical Engineering

Material Science