Design and fabrication of a novel micro electromagnetic actuator

Chia Yen Lee; Zgen Hui Chen; Hsien Tseng Chang; Chiang Ho Cheng; Chih-yung Wen

doi:10.1109/DTIP.2008.4752951

Design and fabrication of a novel micro electromagnetic actuator

Chia Yen Lee, Zgen Hui Chen, Hsien Tseng Chang, Chiang Ho Cheng, Chih-yung Wen

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

4 Citations (Scopus)

Abstract

A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 μm, obtained as applying a current of 0.6 A through the micro coil with 100 μm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.

Original language	English
Title of host publication	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages	52-55
Number of pages	4
DOIs	https://doi.org/10.1109/DTIP.2008.4752951
Publication status	Published - 1 Dec 2008
Externally published	Yes
Event	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France Duration: 9 Apr 2008 → 11 Apr 2008

Conference

Conference	DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Country/Territory	France
City	Nice
Period	9/04/08 → 11/04/08

ASJC Scopus subject areas

Hardware and Architecture
Electrical and Electronic Engineering

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10.1109/DTIP.2008.4752951

Cite this

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title = "Design and fabrication of a novel micro electromagnetic actuator",

abstract = "A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 μm, obtained as applying a current of 0.6 A through the micro coil with 100 μm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.",

author = "Lee, {Chia Yen} and Chen, {Zgen Hui} and Chang, {Hsien Tseng} and Cheng, {Chiang Ho} and Chih-yung Wen",

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Lee, CY, Chen, ZH, Chang, HT, Cheng, CH & Wen, C 2008, Design and fabrication of a novel micro electromagnetic actuator. in DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS., 4752951, pp. 52-55, DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, Nice, France, 9/04/08. https://doi.org/10.1109/DTIP.2008.4752951

Design and fabrication of a novel micro electromagnetic actuator. / Lee, Chia Yen; Chen, Zgen Hui; Chang, Hsien Tseng et al.
DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS. 2008. p. 52-55 4752951.

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

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AU - Chen, Zgen Hui

AU - Chang, Hsien Tseng

AU - Cheng, Chiang Ho

AU - Wen, Chih-yung

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N2 - A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 μm, obtained as applying a current of 0.6 A through the micro coil with 100 μm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.

AB - A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 μm, obtained as applying a current of 0.6 A through the micro coil with 100 μm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.

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Design and fabrication of a novel micro electromagnetic actuator

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