Design and fabrication of a novel micro electromagnetic actuator

Chia Yen Lee, Zgen Hui Chen, Hsien Tseng Chang, Chiang Ho Cheng, Chih-yung Wen

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

4 Citations (Scopus)

Abstract

A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the designed actuator are comprised of a diaphragm, a micro coil, and a magnet. When an electrical current was applied to the micro coils, the magnetic force between the magnet and the coil was produced and caused the diaphragm to deflect and become the source of actuation. The structure of the actuating device used polyimide as the insulating barrier and electroplated copper as the coils. The diaphragm deflection can be regulated by varying the current passed through the micro coil and hence the actuating effects can be controlled. The results show that the maximum diaphragm deflection within elastic limits is 150 μm, obtained as applying a current of 0.6 A through the micro coil with 100 μm line width. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its plane structure.
Original languageEnglish
Title of host publicationDTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Pages52-55
Number of pages4
DOIs
Publication statusPublished - 1 Dec 2008
Externally publishedYes
EventDTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS - Nice, France
Duration: 9 Apr 200811 Apr 2008

Conference

ConferenceDTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS
Country/TerritoryFrance
CityNice
Period9/04/0811/04/08

ASJC Scopus subject areas

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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