Design and fabrication of 256×256 diffractive microlens arrays on Si substrates

Yi Li, Xinjian Yi, Jianhua Hao

Research output: Journal article publicationConference articleAcademic researchpeer-review

3 Citations (Scopus)

Abstract

256×256 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3-5 μm wavelength with a microlens size of 100 μm. The lens F number and array pitch are 1.5 and 100 μm, respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.
Original languageEnglish
Pages (from-to)143-148
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3557
Publication statusPublished - 1 Dec 1998
Externally publishedYes
EventProceedings of the 1998 Conference on Current Developments in Optical Elements and Manufacturing - Beijing, China
Duration: 16 Sep 199818 Sep 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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