Design and fabrication of 128×128 diffractive microlens arrays on Si substrates

Yi Li, Xinjian Yi, Jianhua Hao

Research output: Journal article publicationConference articleAcademic researchpeer-review

Abstract

128 × 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3-5μm wavelength with a microlens size of 100μm. The lens F number and array pitch are 1.5 and 100μm, respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.
Original languageEnglish
Pages (from-to)19-25
Number of pages7
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3505
DOIs
Publication statusPublished - 1 Dec 1998
Externally publishedYes
EventImaging System Technology for Remote Sensing - Beijing, China
Duration: 16 Sep 199817 Sep 1998

Keywords

  • Diffraction
  • Focal plane array
  • Infrared
  • Microlens array

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this