Abstract
128 × 128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3-5μm wavelength with a microlens size of 100μm. The lens F number and array pitch are 1.5 and 100μm, respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 19-25 |
| Number of pages | 7 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3505 |
| DOIs | |
| Publication status | Published - 1 Dec 1998 |
| Externally published | Yes |
| Event | Imaging System Technology for Remote Sensing - Beijing, China Duration: 16 Sept 1998 → 17 Sept 1998 |
Keywords
- Diffraction
- Focal plane array
- Infrared
- Microlens array
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering