Abstract
128×128 diffractive microlens arrays have been designed by considering the independent optical and processing parameters for 3-5 μm wavelength with a microlens size of 100 μm. The lens F number and array pitch are 1.5 and 100 μm, respectively. The diffractive microlens arrays have been fabricated on the surface of Si substrates by successive photolithography and Ar+ ion-beam-etching technique. The practical processes and fabrication method are discussed. The optical characteristics and measurements of the diffractive microlens arrays are presented.
| Original language | English |
|---|---|
| Pages (from-to) | 210-213 |
| Number of pages | 4 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3545 |
| Publication status | Published - 1 Dec 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 International Symposium on Multispectral Image Processing, ISMIP'98 - Wuhan, China Duration: 21 Oct 1998 → 23 Oct 1998 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering