Abstract
Diffractive microlens arrays have been designed to improve the performance of PtSi Schottky barrier infrared image sensors. They have been fabricated on the surface of Si substrates by successive photolithography and Ar+ion-beam-etching technique, which operate at λ=4.0μm with a lens diameter of 100μm and the lens F number of 1.56. The practical processes and fabrication method are shown and discussed. The microanalysis and optical characteristics of the diffractive microlens arrays are also presented. The experimental and theoretical results are in good agreement.
Original language | English |
---|---|
Pages (from-to) | 132-137 |
Number of pages | 6 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3553 |
DOIs | |
Publication status | Published - 1 Dec 1998 |
Externally published | Yes |
Event | Detectors, Focal Plane Arrays, and Imaging Devices II - Beijing, China Duration: 18 Sept 1998 → 19 Sept 1998 |
Keywords
- Binary optics
- Diffraction
- Focal plane array
- Infrared
- Microlens array
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering