Design and fabrication of 128 × 128 diffractive microlens arrays on Si for PtSi FPA

Yi Ly, Xianjian Yi, Jianhua Hao

Research output: Journal article publicationConference articleAcademic researchpeer-review

4 Citations (Scopus)

Abstract

Diffractive microlens arrays have been designed to improve the performance of PtSi Schottky barrier infrared image sensors. They have been fabricated on the surface of Si substrates by successive photolithography and Ar+ion-beam-etching technique, which operate at λ=4.0μm with a lens diameter of 100μm and the lens F number of 1.56. The practical processes and fabrication method are shown and discussed. The microanalysis and optical characteristics of the diffractive microlens arrays are also presented. The experimental and theoretical results are in good agreement.
Original languageEnglish
Pages (from-to)132-137
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume3553
DOIs
Publication statusPublished - 1 Dec 1998
Externally publishedYes
EventDetectors, Focal Plane Arrays, and Imaging Devices II - Beijing, China
Duration: 18 Sep 199819 Sep 1998

Keywords

  • Binary optics
  • Diffraction
  • Focal plane array
  • Infrared
  • Microlens array

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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