Design and experiment of 3-dimensional micro-optical system for MEMS tunable lasers

Xuming Zhang, H. Cai, Chao Lu, C. K. Chen, A. Q. Liu

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

21 Citations (Scopus)


This paper presents a 3-dimensional micro-optical system for improving the optical coupling efficiency in the external cavity tunable lasers. It is constructed by an optical fiber and a curved mirror; the former acts as a rod lens to transform the light in one direction while the latter converges the light in the other direction. Compared with the previous MEMS lasers that have no light focusing or only in one direction, this 3D micro-optical system allows for long external cavity length and high coupling efficiency, which are critical for wide tuning range. A prototype is fabricated on SOI wafer by DRIE with an etching depth of 75 μm. It obtains a coupling efficiency as high as 46.5% with a total external cavity length of 220 μm. In contrast, the coupling efficiency is only 13% when the fiber rod lens is absent, and is 1% when no light transformation is involved. Compared with conventional laser optical systems that employ external ball lenses and other optical components, this 3D micro-optical system possesses the advantages of simple packaging, large alignment tolerance and easy mass production.
Original languageEnglish
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Number of pages4
Publication statusPublished - 24 Oct 2006
Externally publishedYes
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: 22 Jan 200626 Jan 2006


Conference19th IEEE International Conference on Micro Electro Mechanical Systems

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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