TY - JOUR
T1 - Design and Control of a Piezoelectrically Actuated Fast Tool Servo for Diamond Turning of Microstructured Surfaces
AU - Zhu, Zhiwei
AU - Chen, Li
AU - Huang, Peng
AU - Schönemann, Lars
AU - Riemer, Oltmann
AU - Yao, Jianyong
AU - To, Suet
AU - Zhu, Wu Le
N1 - Funding Information:
The work of Z. Zhu was supported by the Alexander von Humboldt-Stiftung, Germany. This work was supported in part by the National Natural Science Foundation of China under Grant 51705254, in part by the Natural Science Foundation of Jiangsu Province under Grant BK20170836, in part by the European Commission (EC)/Research Grants Council (RGC) Collaboration Scheme (E-PolyU502/17), and in part by the European Union's Horizon 2020 Research and Innovation Program (767589). (Corresponding author: Wu-Le Zhu.)
Funding Information:
Manuscript received March 23, 2019; revised July 8, 2019; accepted August 9, 2019. Date of publication August 28, 2019; date of current version March 31, 2020. The work of Z. Zhu was supported by the Alexander von Humboldt-Stiftung, Germany. This work was supported in part by the National Natural Science Foundation of China under Grant 51705254, in part by the Natural Science Foundation of Jiangsu Province under Grant BK20170836, in part by the European Commission (EC)/Research Grants Council (RGC) Collaboration Scheme (E-PolyU502/17), and in part by the European Union’s Horizon 2020 Research and Innovation Program (767589). (Corresponding author: Wu-Le Zhu.) Z. Zhu, L. Chen, and J. Yao are with the School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China (e-mail:, [email protected]; [email protected]; [email protected]).
Publisher Copyright:
© 1982-2012 IEEE.
PY - 2020/8
Y1 - 2020/8
N2 - This article reports on the mechanism design, dimension optimization, closed-loop control, and practical application of a piezoelectrically actuated fast tool servo (FTS) for the diamond turning of microstructured surfaces. With the mechanism, a finite-element based analytical model is developed to theoretically relate the working performance with its structural dimensions. Considering its application for micro/nanocutting, the structural dimensions of the mechanism are deliberately determined through evolutionarily optimizing a comprehensive objective. To ultrafinely track the cutting trajectory with a high bandwidth, a proportional-integral-derivative controller together with the dynamics inversion based feedforward compensation is optimally designed with assistance of the Nyquist diagram, and a disturbance observer is further employed to compensate for the inherent hysteresis nonlinearity as well as external cutting force disturbances. Both open-loop and closed-loop experimental tests on the prototype suggest that a stroke of 18\mum and a closed-loop bandwidth of 1730 Hz are achieved. Taking advantage of the newly developed FTS, two typical microstructured surfaces are ultraprecisely turned, well demonstrating the effectiveness of the FTS.
AB - This article reports on the mechanism design, dimension optimization, closed-loop control, and practical application of a piezoelectrically actuated fast tool servo (FTS) for the diamond turning of microstructured surfaces. With the mechanism, a finite-element based analytical model is developed to theoretically relate the working performance with its structural dimensions. Considering its application for micro/nanocutting, the structural dimensions of the mechanism are deliberately determined through evolutionarily optimizing a comprehensive objective. To ultrafinely track the cutting trajectory with a high bandwidth, a proportional-integral-derivative controller together with the dynamics inversion based feedforward compensation is optimally designed with assistance of the Nyquist diagram, and a disturbance observer is further employed to compensate for the inherent hysteresis nonlinearity as well as external cutting force disturbances. Both open-loop and closed-loop experimental tests on the prototype suggest that a stroke of 18\mum and a closed-loop bandwidth of 1730 Hz are achieved. Taking advantage of the newly developed FTS, two typical microstructured surfaces are ultraprecisely turned, well demonstrating the effectiveness of the FTS.
KW - Compliant mechanism
KW - diamond turning
KW - disturbance observer
KW - fast tool servo (FTS)
KW - microstructured surface
UR - http://www.scopus.com/inward/record.url?scp=85083325963&partnerID=8YFLogxK
U2 - 10.1109/TIE.2019.2937051
DO - 10.1109/TIE.2019.2937051
M3 - Journal article
AN - SCOPUS:85083325963
SN - 0278-0046
VL - 67
SP - 6688
EP - 6697
JO - IEEE Transactions on Industrial Electronics
JF - IEEE Transactions on Industrial Electronics
IS - 8
M1 - 8818669
ER -