Design and Control of a Piezoelectrically Actuated Fast Tool Servo for Diamond Turning of Microstructured Surfaces

Zhiwei Zhu, Li Chen, Peng Huang, Lars Schönemann, Oltmann Riemer, Jianyong Yao, Suet To, Wu Le Zhu

Research output: Journal article publicationJournal articleAcademic researchpeer-review

48 Citations (Scopus)


This article reports on the mechanism design, dimension optimization, closed-loop control, and practical application of a piezoelectrically actuated fast tool servo (FTS) for the diamond turning of microstructured surfaces. With the mechanism, a finite-element based analytical model is developed to theoretically relate the working performance with its structural dimensions. Considering its application for micro/nanocutting, the structural dimensions of the mechanism are deliberately determined through evolutionarily optimizing a comprehensive objective. To ultrafinely track the cutting trajectory with a high bandwidth, a proportional-integral-derivative controller together with the dynamics inversion based feedforward compensation is optimally designed with assistance of the Nyquist diagram, and a disturbance observer is further employed to compensate for the inherent hysteresis nonlinearity as well as external cutting force disturbances. Both open-loop and closed-loop experimental tests on the prototype suggest that a stroke of 18\mum and a closed-loop bandwidth of 1730 Hz are achieved. Taking advantage of the newly developed FTS, two typical microstructured surfaces are ultraprecisely turned, well demonstrating the effectiveness of the FTS.

Original languageEnglish
Article number8818669
Pages (from-to)6688-6697
Number of pages10
JournalIEEE Transactions on Industrial Electronics
Issue number8
Publication statusPublished - Aug 2020


  • Compliant mechanism
  • diamond turning
  • disturbance observer
  • fast tool servo (FTS)
  • microstructured surface

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering


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