Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

Xiao Xiao, Ruidong Xi, Yangmin Li (Corresponding Author), Yirui Tang, Bingxiao Ding, Hongliang Ren, Max Q.H. Meng (Corresponding Author)

Research output: Journal article publicationJournal articleAcademic researchpeer-review

5 Citations (Scopus)


In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

Original languageEnglish
Pages (from-to)3763-3772
Number of pages10
JournalMicrosystem Technologies
Issue number10
Publication statusPublished - Oct 2021

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering


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