Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

Xiao Xiao; Ruidong Xi; Yangmin Li; Yirui Tang; Bingxiao Ding; Hongliang Ren; Max Q.H. Meng

doi:10.1007/s00542-020-05163-3

Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

Xiao Xiao, Ruidong Xi, Yangmin Li (Corresponding Author), Yirui Tang, Bingxiao Ding, Hongliang Ren, Max Q.H. Meng (Corresponding Author)

Research output: Journal article publication › Journal article › Academic research › peer-review

7 Citations (Scopus)

Abstract

In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

Original language	English
Pages (from-to)	3763-3772
Number of pages	10
Journal	Microsystem Technologies
Volume	27
Issue number	10
DOIs	https://doi.org/10.1007/s00542-020-05163-3
Publication status	Published - Oct 2021

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Hardware and Architecture
Electrical and Electronic Engineering

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10.1007/s00542-020-05163-3

http://hdl.handle.net/10397/94559

Cite this

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title = "Design and control of a novel electromagnetic actuated 3-DoFs micropositioner",

abstract = "In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.",

author = "Xiao Xiao and Ruidong Xi and Yangmin Li and Yirui Tang and Bingxiao Ding and Hongliang Ren and Meng, {Max Q.H.}",

note = "Funding Information: This work was supported in part by National Key R&D program of China with Grant No. 2019YFB1312400, National Natural Science Foundation of China (51575544), Hong Kong RGC TRS grant T42-409/18-R, Huxiang High Level Talent Project of Hunan Province (2019RS1066). Funding Information: This work was supported in part by National Key R&D program of China with Grant No. 2019YFB1312400,?National Natural Science Foundation of China (51575544),?Hong Kong RGC TRS grant T42-409/18-R,?Huxiang High Level Talent Project of Hunan Province (2019RS1066). Publisher Copyright: {\textcopyright} 2021, The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature.",

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AU - Xiao, Xiao

AU - Xi, Ruidong

AU - Li, Yangmin

AU - Tang, Yirui

AU - Ding, Bingxiao

AU - Ren, Hongliang

AU - Meng, Max Q.H.

N1 - Funding Information: This work was supported in part by National Key R&D program of China with Grant No. 2019YFB1312400, National Natural Science Foundation of China (51575544), Hong Kong RGC TRS grant T42-409/18-R, Huxiang High Level Talent Project of Hunan Province (2019RS1066). Funding Information: This work was supported in part by National Key R&D program of China with Grant No. 2019YFB1312400,?National Natural Science Foundation of China (51575544),?Hong Kong RGC TRS grant T42-409/18-R,?Huxiang High Level Talent Project of Hunan Province (2019RS1066). Publisher Copyright: © 2021, The Author(s), under exclusive licence to Springer-Verlag GmbH, DE part of Springer Nature.

PY - 2021/10

Y1 - 2021/10

N2 - In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

AB - In this paper, a novel electromagnetic micropositioner is designed from an orthogonal 3-P(4S) parallel mechanism through the substitution method and modular design techniques. Preliminary prototype experiments show that the micropositioner possesses an excellent decoupling performance. Thus an independent control strategy is carried out for the motion control of the micropositioner. An RBF neural networks based adaptive backstepping terminal sliding mode controller is designed according to the nonlinearity characteristics of the actuator. Parameters of the system are identified with a genetic algorithm. Finally, the performances of the micropositioner and the developed control strategy are verified. Experimental results demonstrate that satisfactory performances can be achieved.

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Design and control of a novel electromagnetic actuated 3-DoFs micropositioner

Abstract

ASJC Scopus subject areas

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