Design and control of a new 3-PUU fast tool servo for complex microstructure machining

Hui Tang, Hongcheng Li, Suet To, Kai Ming Yu, Yunbo He, Jian Gao, Xin Chen, Jiedong Li

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)


Ultra-precision fast tool servo (FTS) machining technology is an effective method for complex surface microstructure machining. However, as for a single degree-of-freedom FTS, it can only achieve a high-rate reciprocating movement in one direction; thus, it cannot realize ultra-precision machining for some complex microstructural surface. Therefore, a novel flexure-based fast tool servo device composed of two platforms and three branched chains is proposed in this work, which aims to realize a robotic ultra-precision machining with XYZ translational precision motion. Each of the branched chain is made up of a prismatic pair, two hook hinges, and a connecting rod. The FTS mechanism design and modeling are carried out firstly; then, the FTS device characterization in terms of statics analysis and modal analysis is conducted; in order to suppress the hysteresis nonlinearity and improve the positioning precision, a new repetitive-compensated PID controller combined with an inverted modified Prandtl-Ishlinskii model is proposed to handle this issue. It indicates that the displacement amplification ratio is 3.87; thus, the workspace can reach to [− 85, 85]∪[− 80,80]∪[0,120]μm3, and the closed-loop positioning precision is 600 nm, which will be considered to fulfill practical FTS machining tasks.
Original languageEnglish
Pages (from-to)3503-3517
Number of pages15
JournalInternational Journal of Advanced Manufacturing Technology
Issue number9-12
Publication statusPublished - 1 Feb 2018


  • Fast tool servo
  • Flexure
  • Hysteresis model
  • Microstructure
  • Ultra-precision machining

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Software
  • Mechanical Engineering
  • Computer Science Applications
  • Industrial and Manufacturing Engineering

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