TY - JOUR
T1 - Design and analysis of new ultra compact decoupled XYZθ stage to achieve large-scale high precision motion
AU - Chen, Xigang
AU - Li, Yangmin
AU - Xie, Yanlin
AU - Wang, Ruobing
N1 - Funding Information:
The authors would like to thank the support provided by the National Natural Science Foundation of China (Grant No. 51575544 ), the General Research Fund (GRF) of the Research Grants Council (RGC) of Hong Kong, China (Grant No. PolyU 152137/19E ), and the Research Student Project of The Hong Kong Polytechnic University (Grant No. RK34 ).
Publisher Copyright:
© 2021 Elsevier Ltd
PY - 2022/1
Y1 - 2022/1
N2 - A new high precision ultra-compact decoupled XYZθ motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial–parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZθ four axes output displacement. The function of serial–parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZθ four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZθ stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives.
AB - A new high precision ultra-compact decoupled XYZθ motion stage based on flexure hinges is designed and analyzed. The stage mainly consists of three components including serial–parallel dual-stage amplifier, Z-shape motion steering mechanism and motion decoupled mechanism. Compared with the existing stages, the proposed high precision motion stage has many advantages such as extremely compact structure, large output decoupling motion and XYZθ four axes output displacement. The function of serial–parallel dual-stage amplifier is to amplify the travel range of nano positioning piezo actuator (PZT) by connecting two parallel bridge type mechanism. The Z-shape mechanism can change the direction of motion transmission to make the stage more compact and form movement in XYZθ four directions. The decouple mechanism can reduce the implicative movement of different piezo actuators. Then, kinetostatic analysis of this new XYZθ stage is conducted to analyze the stage. Finally, the finite-element analysis (FEA) and prototype experiments are implemented to verify the design objectives.
KW - Decoupled XYZθ stage
KW - Flexure mechanism design
KW - Large-scale high precision motion
KW - Two-stage amplifier
KW - Ultra compact structure
UR - http://www.scopus.com/inward/record.url?scp=85115381557&partnerID=8YFLogxK
U2 - 10.1016/j.mechmachtheory.2021.104527
DO - 10.1016/j.mechmachtheory.2021.104527
M3 - Journal article
AN - SCOPUS:85115381557
SN - 0094-114X
VL - 167
JO - Mechanism and Machine Theory
JF - Mechanism and Machine Theory
M1 - 104527
ER -