Design and analysis of microcantilevers for biosensing applications

Xuan Zhang, Mo Yang, Kambiz Vafai, Cengiz S. Ozkan

Research output: Journal article publicationJournal articleAcademic researchpeer-review

11 Citations (Scopus)


We have analyzed the detection of microcantilevers utilized in biosensing chips. First, the primary deflection due to the chemical reaction between the analyte molecules and the receptor coating, which produces surface stresses on the receptor side is analyzed. Oscillating flow conditions, which are the main source of turbulence in cantilever based biosensing chips, are found to produce substantial deflections in the microcantilever at relatively large frequency of turbulence. Then mechanical design and optimization of piezoresistive cantilevers for biosensing applications is studied. Models are described for predicting the static behavior of cantilevers with elastic and piezoresistive layers. Chemo-mechanical binding forces have been analyzed to understand issues of saturation over the cantilever surface. Furthermore, the introduction of stress concentration regions during cantilever fabrication has been discussed which greatly enhances the detection sensitivity through increased surface stress, and novel microcantilever assemblies are presented for the first time that can increase the deflection due to chemical reaction. Finally an experiment was made to demonstrate the shift of resonant frequency of cantilever used as biosensor. The relation between resonant frequency shift and the surface stress was analyzed.
Original languageEnglish
Pages (from-to)90-93
Number of pages4
JournalJALA - Journal of the Association for Laboratory Automation
Issue number2
Publication statusPublished - 1 Jan 2003
Externally publishedYes

ASJC Scopus subject areas

  • Computer Science Applications
  • Medical Laboratory Technology


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