Design and Analysis of a two Layered 3-RRR Micro/nano Manipulating Stage

Bingxiao Ding; Yangmin Li

doi:10.1109/NANO.2014.6968110

Design and Analysis of a two Layered 3-RRR Micro/nano Manipulating Stage

Bingxiao Ding, Yangmin Li

Research output: Chapter in book / Conference proceeding › Conference article published in proceeding or book › Academic research › peer-review

2 Citations (Scopus)

Abstract

Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.

Original language	English
Title of host publication	14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
Publisher	IEEE
Pages	1054-1059
Number of pages	6
ISBN (Electronic)	9781479956227
DOIs	https://doi.org/10.1109/NANO.2014.6968110
Publication status	Published - 1 Jan 2014
Externally published	Yes
Event	2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 - Toronto, Canada Duration: 18 Aug 2014 → 21 Aug 2014

Conference

Conference	2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
Country/Territory	Canada
City	Toronto
Period	18/08/14 → 21/08/14

Keywords

Analysis
Design
Micromanipulation
Stage

ASJC Scopus subject areas

Electrical and Electronic Engineering
Computer Science Applications
Modelling and Simulation
Instrumentation

More information

10.1109/NANO.2014.6968110

Cite this

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title = "Design and Analysis of a two Layered 3-RRR Micro/nano Manipulating Stage",

abstract = "Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.",

keywords = "Analysis, Design, Micromanipulation, Stage",

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booktitle = "14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014",

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AU - Ding, Bingxiao

AU - Li, Yangmin

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Y1 - 2014/1/1

N2 - Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.

AB - Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.

KW - Analysis

KW - Design

KW - Micromanipulation

KW - Stage

UR - http://www.scopus.com/inward/record.url?scp=84919475714&partnerID=8YFLogxK

U2 - 10.1109/NANO.2014.6968110

DO - 10.1109/NANO.2014.6968110

M3 - Conference article published in proceeding or book

SP - 1054

EP - 1059

BT - 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014

PB - IEEE

T2 - 2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014

Y2 - 18 August 2014 through 21 August 2014

ER -

Design and Analysis of a two Layered 3-RRR Micro/nano Manipulating Stage

Abstract

Conference

Keywords

ASJC Scopus subject areas

More information

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