Design and Analysis of a two Layered 3-RRR Micro/nano Manipulating Stage

Bingxiao Ding, Yangmin Li

Research output: Chapter in book / Conference proceedingConference article published in proceeding or bookAcademic researchpeer-review

2 Citations (Scopus)


Recently, many kinds of micro manipulation stages with large stroke and high positioning precision are developed for cell manipulation and optical fiber alignment. In this paper, a 3-DOF micro manipulation stage with dual layers is proposed and PZTs are chosen as the actuators for its high resolution and bandwidth. This mechanism is stacked by two layers and each of floor can make the stage have different rotational direction, namely, clockwise and counter clockwise rotation. In order to extablish an accurate model, the matrix method is adopted and kinematics, dynamics, and simulation based on Simechanics are conducted, the workspace of the stage is derived at last.
Original languageEnglish
Title of host publication14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014
Number of pages6
ISBN (Electronic)9781479956227
Publication statusPublished - 1 Jan 2014
Externally publishedYes
Event2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 - Toronto, Canada
Duration: 18 Aug 201421 Aug 2014


Conference2014 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014


  • Analysis
  • Design
  • Micromanipulation
  • Stage

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Computer Science Applications
  • Modelling and Simulation
  • Instrumentation

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